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\usepackage{booktabs}
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\begin{document}
\rotatebox{90}{%
\sffamily\small
\begin{tabular}{@{}lccccclll@{}}\toprule
Autor &amp; FlÃ¤che &amp; Airgap &amp; Empfindl. &amp;
Frequenz &amp; Rauschen &amp; Materialien &amp; Quellen &amp; Aufbauart \tabularnewline
&amp; &amp; &amp; &amp; &amp; &amp; Membran, Elektrode &amp; &amp; \tabularnewline
\cmidrule(lr){2-2}\cmidrule(lr){3-3}\cmidrule(lr){4-4}\cmidrule(lr){5-5}\cmidrule(lr){6-6}
  &amp; \unit{mm\textsuperscript{2}} &amp; \unit{\textmu m} &amp; \unit{mV/Pa} &amp;
    \unit{Hz-kHz} &amp;  \unit{dBA SPL} &amp; &amp; &amp; \tabularnewline
\cmidrule(r){1-1}\cmidrule(lr){2-2}\cmidrule(lr){3-3}\cmidrule(lr){4-4}\cmidrule(lr){5-5}
\cmidrule(lr){6-6}\cmidrule(lr){7-7}\cmidrule(lr){8-8}\cmidrule(l){9-9}
\addlinespace
% Tabellenkopf Ende
Schellin &amp; 1 &amp; &amp; 0,3 &amp; -- &amp; &amp; Poly-Si, Poly-Si &amp;
[6,7,9] &amp;%\cite{Schellin:1997:01,Schellin:1994:01,Schellin-1993-01} &amp;
\tabularnewline
van der Donk &amp; &amp; &amp; &amp; &amp; &amp; &amp;
[12] &amp;%  \cite{Donk:1992:01} &amp;
\tabularnewline
Bernstein &amp; 0,57 &amp; 2,2 &amp; 10,77 &amp; -20 &amp;--&amp; Nitrid, Gold &amp;
[13] &amp;%\cite{Kabir:1999:01} &amp;
\tabularnewline
Chen &amp;-- &amp;2 &amp;40 &amp;50--15 &amp;-- &amp;Poly-Si, Mono-Si &amp;
[17,18]&amp;%\cite{Chen:2002:01,Chen:2003:01} &amp;
\tabularnewline
DehÃ© &amp; $\varnothing$1.2&amp;1 &amp;3,2 &amp;100--10 &amp;30 &amp;Poly-Si, Epi-Poly &amp;
[19,10] &amp;%\cite{Dehe:1999:01,Brauer:2001:01} &amp;
\tabularnewline
Hsu &amp;2 &amp;4 &amp;--&amp;200--10 &amp;&amp;Poly-Si, Mono-Si &amp;
[7]&amp;%\cite{Hsu:1998:01} &amp;
\tabularnewline
Kronast &amp;2 &amp;1,3 &amp;11 &amp;300--20&amp;--&amp;Nitrid+Alu, Mono-Si &amp;
[20,21,22]&amp;%\cite{Kronast:1996:01,Kronast:2001:01,Stoffel:1999:01} &amp;
\tabularnewline
Li &amp;1 &amp;--&amp;9,6 &amp;100--19&amp;--&amp;Poly-Si, Poly-Si &amp;
[1,24]&amp;%\cite{Li:2001:01,Wang:2004:01} &amp;
\tabularnewline
Pedersen &amp; 4,84 &amp;3,6 &amp;--&amp;100--15 &amp;60 &amp;Gold, Polymid &amp;
[2,6]&amp;%\cite{Pedersen:1997:01,Pedersen:1998:01} &amp;
\tabularnewline
Rombach &amp;1 &amp;0,9 &amp;14 &amp;20--10&amp;22,5 &amp;Poly-Si, Poly-Si &amp;
[17,18]&amp;%\cite{Rombach:2000:01,Rombach:2002:01} &amp;
\tabularnewline
KovÃ¡cs &amp;0,25 &amp;1,5 &amp;-- &amp;-- &amp;-- &amp;Poly-Si, Poly-Si &amp;
[25,26]&amp;%\cite{Kovacs:1995:01} &amp;
\tabularnewline
Torkkeli &amp;1 &amp;1,3 &amp;2 &amp;10--12 &amp;35 &amp;Poly-Si, Poly-Si &amp;
[26]&amp;%\cite{Torkkeli:2000:01} &amp;
\rdelim\}{-12}{1mm}[1 Chip] \tabularnewline
\addlinespace
\cmidrule(r){1-1}\cmidrule(lr){2-2}\cmidrule(lr){3-3}\cmidrule(lr){4-4}\cmidrule(lr){5-5}
\cmidrule(lr){6-6}\cmidrule(lr){7-7}\cmidrule(lr){8-8}\cmidrule(l){9-9}
\addlinespace
Bay &amp;4 &amp;0,4 &amp;27 &amp;&amp;&amp;&amp;
[26,27,28,30]&amp;%\cite{Bay:1999:01,Bay:1996:01,Bay:1997:01,Bouwstra:1998:01} &amp;
\tabularnewline
FÃ¼ldner&amp;&amp;&amp;&amp;&amp;&amp;&amp;&amp;\tabularnewline
Tajima &amp;4 &amp;15 &amp;7 &amp;75--24 &amp;-- &amp;Oxid, Mono-Si &amp;
[29]&amp;%\cite{Tajima:2003:01} &amp;
\rdelim\}{-3}{1mm}[2 Chip] \tabularnewline
\addlinespace
\cmidrule(r){1-1}\cmidrule(lr){2-2}\cmidrule(lr){3-3}\cmidrule(lr){4-4}\cmidrule(lr){5-5}
\cmidrule(lr){6-6}\cmidrule(lr){7-7}\cmidrule(lr){8-8}\cmidrule(l){9-9}
\addlinespace
Kressmann &amp;1 &amp;1 &amp;2,9 &amp;100--10&amp;39 &amp;Oxid+Nitrid, Poly-Si&amp;
[11,12]&amp;%\cite{Kressmann:2001:01,Kressmann:2002:01} &amp;
\tabularnewline
Thielemann &amp; &amp; &amp; &amp; &amp; &amp; &amp;
[8] &amp; \tabularnewline% \cite{Thielemann:1997:01} &amp; \tabularnewline
Hsieh &amp; 64 &amp; 4,5 &amp; 40 &amp; 100--10 &amp; 60 &amp; Nitrid, Nitrid &amp;
[1,2,4] &amp; \tabularnewline %\cite{Hsieh:1997:01,Hsieh:1999:01,Hsieh:2001:01} &amp; \tabularnewline %,Hsu:1996:01
Murphy &amp; -- &amp; -- &amp; 8 &amp; 100--15 &amp; -- &amp;
Al + Nitrid, Mono-Si&amp;
[3] &amp; \tabularnewline % \cite{Murphy:1989:01} &amp; \tabularnewline
Zou &amp; 1 &amp; 2,6 &amp; 14,2 &amp; 9--16 &amp; -- &amp; Poly-Si , Mono-Si &amp;
[7] &amp; %\cite{Zou:1997:01,Zou:1998:01} &amp;
\rdelim\}{-5}{1mm}[Elektret] \tabularnewline
\addlinespace
\bottomrule
\end{tabular}}% end of rotatebox
\end{document}
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